Stackup Summary TowerJazz SBC18H


Metal
Level
top
0
1
2
2.81µm metal6 -- 3
4
1.59µm metal5 -- 5
6
0.62µm metal4 -- 7
8
0.52µm metal3 -- 9
10
0.52µm metal2 -- 11
12
0.52µm metal1 -- 13
14
0.28µm act -- 15
16
GND
Thickness
[µm]		 Material
Name		 Epsilon Dielectric
Loss Tangent 		Diel Cond
[S/m]
2500 air_above 1 0 0
0.6 nitride_overcoat 7 0 0
0.2 oxide_overcoat 4.2 0 0
2.81 at_metal6 4.2 0 0
2 below_metal6 4.2 0 0
1.59 at_metal5 4.2 0 0
2 below_metal5 4.2 0 0
0.62 at_metal4 4.2 0 0
0.8 below_metal4 4.2 0 0
0.52 at_metal3 4.2 0 0
0.8 below_metal3 4.2 0 0
0.52 at_metal2 4.2 0 0
0.8 below_metal2 4.2 0 0
0.52 at_metal1 4.2 0 0
0.86 below_metal1 4.1 0 0
0.28 STI 4.2 0 0
0.6 EPI 11.9 0 200
370 Si 11.9 0 12.5




Metal Summary


Sonnet
Level		 Material name Thickness
[µm]		 Conductivity
[S/m] 		mOhm/square Metal
Model 		Fill type Cadence/ADS layer name GDSII layer number GDSII data type
3 metal6 2.81 3.389E7 10.5 mOhm/sq "ThickMetalModel", NS=2 Default metal6 58 0
5 metal5 1.59 3.495E7 18.0 mOhm/sq "ThickMetalModel", NS=2 Default metal5 48 0
7 metal4 0.62 2.445E7 66.0 mOhm/sq "ThickMetalModel", NS=2 Default metal4 38 0
9 metal3 0.52 2.346E7 82.0 mOhm/sq "ThickMetalModel", NS=2 Default metal3 28 0
11 metal2 0.52 2.346E7 82.0 mOhm/sq "ThickMetalModel", NS=2 Default metal2 18 0
13 metal1 0.52 2.346E7 82.0 mOhm/sq "ThickMetalModel", NS=2 Default metal1 8 0
15 act 0.28 64.935E4 5.5 Ohm/sq "ThickMetalModel", NS=2 Default act 2 0




Via Summary


From Level To Level Material name Conductivity
[S/m] 		Metal
Model 		Cadence/ADS layer name GDSII layer number GDSII data type
12 11 via1 2.152E6 "Via Volume" Solid via1 17 0
10 9 via2 2.152E6 "Via Volume" Solid via2 27 0
8 7 via3 2.152E6 "Via Volume" Solid via3 37 0
6 5 via4 3.636E6 "Via Volume" Solid via4 47 0
4 3 via5 3.636E6 "Via Volume" Solid via5 57 0
13 15 contact 3.636E6 "Via Volume" Solid contact 7 0